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PVD Cryofox Discovery 500
Cryofox Discovery 500, upgraded PVD apparatus with HiPIMS and DCMS power sources.
- 3 unbalanced magnetrons (2 focused) with DC and HiPIMS sources
- Rotating holder with underfloor heating up to 500ºC and pulse bias up to -1400 V
- Reaction sputtering (N2, C2H2, H2, O2, etc.)
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