Pilot Scale Combinatorial EB-PVD System

TORR Int. Inc., SUA, inox, 5 e-guns with 300 cm3 capacity each with 5 separate high voltage power supplies with 10KW each (10 KV, 1000 MA) switch mode DC high voltage power supplies; separate X-Y sweep controllers; deposition thickness control with a quartz crystal microbalance; maximum deposition surface: 350×350 mm2 or 350 mm in diameter. The installation allows deposition on rotating 3D plates or rods with a length of max. 350 mm; simultaneous or multilayer deposition of thin films; heating substrates during deposition; (W, Ni, Co, Cr, Al, Y), dielectric materials (Al2O3, SiO2, ZrO2, etc.) and compounds.

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TORR Int. Inc., SUA, inox, 5 e-guns with 300 cm3 capacity each with 5 separate high voltage power supplies with 10KW each (10 KV, 1000 MA) switch mode DC high voltage power supplies; separate X-Y sweep controllers; deposition thickness control with a quartz crystal microbalance; maximum deposition surface: 350×350 mm2 or 350 mm in diameter. The installation allows deposition on rotating 3D plates or rods with a length of max. 350 mm; simultaneous or multilayer deposition of thin films; heating substrates during deposition; (W, Ni, Co, Cr, Al, Y), dielectric materials (Al2O3, SiO2, ZrO2, etc.) and compounds.

Department: IMNR – High PTMET Research Center

References:

  1. M.L. Grilli, D. Valerini, A.E. Slobozeanu, B.O. Postolnyi, S. Balos, A. Rizzo, R.R. Piticescu, Critical Raw Materials Saving by Protective Coatings under Extreme Conditions: A Review of Last Trends in Alloys and Coatings for Aerospace Engine Applications, Materials (Basel). 14 (2021) 1656. doi:10.3390/ma14071656.
  2. A.M. Motoc, S. Valsan, A.E. Slobozeanu, M. Corban, D. Valerini, M. Prakasam, M. Botan, V. Dragut, B. St. Vasile, A.V. Surdu, R. Trusca, M.L. Grilli, R.R. Piticescu, Design, Fabrication, and Characterization of New Materials Based on Zirconia Doped with Mixed Rare Earth Oxides: Review and First Experimental Results, Metals (Basel). 10 (2020) 746. doi:10.3390/met10060746.
  3. R.R. Piticescu, M. Urbina, A. Rinaldi, S. Cuesta-Lopez, A. Sobetkii, Development of Novel Material Systems and Coatings for Extreme Environments: A Brief Overview, JOM. 71 (2019) 683–690. doi:10.1007/s11837-018-3273-6.
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