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ZEISS EVO MA 15 – Environmental Scanning Electron Microscope
Environmental SEM ZEISS EVO MA 15 with integrated analytical methods EDX and WDX (Oxford Instruments, United Kingdom)
- W filament
- SE and BSE detectors adopted for operation at higher pressure
- Energy-Dispersive X-Ray Spectroscopy (EDS or EDX)
- Wavelength-Dispersive X-ray spectroscopy (WDS or WDX)
- The range of the working pressure in the chamber – up to 400 Pa
- 5-axis motorized table
- Large chamber
- Oil free vacuum
Location: Laboratory of Environmental Scanning Electron Microscopy
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