- Dual illumination by white and short wave monochromatic light;
- Automatic switching between the confocal and interferometric modes just by choosing the objective and switching the software;
- Vertical resolution in the PSI mode < 0.02 nm;
- Deviation from linearity during the vertical scanning in 50 um range < 60 nm;
- Vertical resolution in the VSI mode < 1.5 nm Frame rate in the confocal mode > 10 frame/s;
- Interferometric objectives from x2.5 up to x150;
- Optical surface imaging in bright field in real colours;
- Motorized and piezo movement in Z direction, motorized XY table;
- Manual biaxial slope correction;
- Software for mapping and stitching of images, and evaluation of topographic surface parameters.
Location: Laboratory of Light Microscopy
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